Accurate Surface Topography
Sub-nanometer vertical resolution-All magnifications
Motorized, programmable stage/Stitching Large area measurements
Optical Profiling System non-contact 3D surface Metrology, dual-LED illumination, 2D/3D data analysis and visualization. Objectives standard 5X,10X,20X,50X. Motorized turret. Magnification from .75X to 100X. Field of view 0.55x, 0.75x, 1x, 1.5x, 2x. Automated 100mm Z-axis, +/- 6 degree tip/tilt stage. 100mm XY manual stage, optional 150mm XY auto stage. Vertical Measurement 0.1nm to 10mm Std. Verical Resolution <0.1nm, RMS Repeatability 0.05nm. Vertical Scan Speed 24um/sec. Lateral Spatial Sampling 0.1 to 13.2um. Optical Resolution 0.49um min. Field of View 7.68 x 5.76mm max, 0.06 x 0.07 min. Step Height 0.8% accuracy.
Software: Vision32, Ver. 4.20. Pass/Fail built-in database for any parameter. Stitching, Matlab/TCPIP, Film Analysis, Optical Analysis, and Sure Vision.
Dimension: 320mm W x 510mm D x 645mm H
Weight without peripheral Electronics and air table: 70 kg
DIRECT ADVANCED OPERATIONS 